A modular line of turbomolecular vacuum pumps with pumping speeds from 90 to 1450 l/s.
TURBOVAC i / iX has hybrid rotor bearings: the bearing on the fore vacuum side is a ceramic ball bearing lubricated for life and the bearing on the high vacuum side is implemented by way of a non-wearing magnetic bearing.
TURBOVAC i/iX turbomolecular pumps have unique pump stages designed to deliver reliable and consistent performance across a range of processes and demanding applications with increased gas flows.
TURBOVAC i/iX series have been designed to optimize both pumping speed performance and compression ratio. Its wide range of performance varies from 90 to 1450 l/s and includes light gas pumping speed.
